Title :
Fabrication of three-dimensional conducting nanostructures by nonlinear lithography
Author :
Terzaki, Konstantina ; Gaidukeviciute, Arune ; Reinhardt, Carsten ; Fotakis, Costas ; Vamvakaki, Maria ; Farsari, Maria
Author_Institution :
Inst. of Electron. Struct. & Laser (IESL), Found. for Res. & Technol. Hellas (FORTH), Heraklion, Greece
Abstract :
The structuring and metallization of a zirconium-containing organic-inorganic photosensitive material doped with a metal-binding monomer was reported. The silver seeding and reduction parameters were examined and two different metallization techniques, metal bath and silver plating were examined on visual results and ohmic conductivity.
Keywords :
doping; electrical conductivity; metallisation; nanofabrication; nanolithography; nanostructured materials; ohmic contacts; organic-inorganic hybrid materials; photochemistry; polymerisation; reduction (chemical); silver; two-photon processes; zirconium compounds; Ag; metal bath; metal-binding monomer doping; metallization; nonlinear lithography; ohmic conductivity; reduction parameters; silver plating; silver seeding; three-dimensional conducting nanostructures; two-photon polymerization; zirconium-containing organic-inorganic photosensitive material; Fabrication; Metallization; Polymers; Silver; Three dimensional displays;
Conference_Titel :
BioPhotonics, 2011 International Workshop on
Conference_Location :
Parma
Print_ISBN :
978-1-4244-9836-9
Electronic_ISBN :
978-1-4244-9835-2
DOI :
10.1109/IWBP.2011.5954827
