Title :
X-band and K-band lumped Wilkinson power dividers with a micromachined technology
Author :
Liang-Hung Lu ; Bhattacharya, P. ; Katehi, L.P.B. ; Ponchak, G.E.
Author_Institution :
Michigan Univ., Ann Arbor, MI, USA
Abstract :
With a novel micromachined technology, Wilkinson power dividers have been realized by lumped components such as spiral inductors, metal-insulator-metal (MIM) capacitors and thin-film resistors (TFRs). For the first time, X-band and K-band power dividers with low loss (0.6 dB) and wide bandwidth (25% bandwidth for 15 dB return loss) have been demonstrated in this work. Due to the process compatibility, this technology is suitable for Si-based MMIC applications.
Keywords :
MIM devices; MMIC; inductors; micromachining; power dividers; thin film capacitors; thin film resistors; 0.6 dB; 15 dB; K-band power dividers; MIM capacitors; NiCr; NiCr thin-film resistors; Si; Si-based MMIC applications; X-band power dividers; low loss; lumped Wilkinson power dividers; micromachined spiral inductors; micromachined technology; wide bandwidth; Bandwidth; Frequency conversion; Inductors; K-band; MIM capacitors; Power dividers; Q factor; Resonant frequency; Space technology; Spirals;
Conference_Titel :
Microwave Symposium Digest. 2000 IEEE MTT-S International
Conference_Location :
Boston, MA, USA
Print_ISBN :
0-7803-5687-X
DOI :
10.1109/MWSYM.2000.860981
