DocumentCode
2310040
Title
Femtosecond laser micromachining for the realization of fully integrated optofluidic devices
Author
Osellame, Roberto ; Vazquez, Rebeca Martinez ; Crespi, Andrea ; Cerullo, Giulio ; Ramponi, Roberta
Author_Institution
Dept. of Phys., Politec. di Milano, Milan, Italy
fYear
2011
fDate
8-10 June 2011
Firstpage
1
Lastpage
3
Abstract
Femtosecond laser micromachining is a powerful tool for the fabrication of both optical waveguides and, when followed by chemical etching, of microchannels, with unprecedented intrinsic 3D capabilities. Basics of the technique and examples of fully integrated optofluidic devices are presented.
Keywords
high-speed optical techniques; integrated optics; laser beam etching; laser beam machining; micro-optomechanical devices; microchannel flow; micromachining; optical fabrication; optical waveguides; chemical etching; femtosecond laser micromachining; fully integrated optofluidic devices; microchannels; optical waveguides; Microfluidics; Optical device fabrication; Optical refraction; Optical variables control; Optical waveguides; Ultrafast optics; Waveguide lasers;
fLanguage
English
Publisher
ieee
Conference_Titel
BioPhotonics, 2011 International Workshop on
Conference_Location
Parma
Print_ISBN
978-1-4244-9836-9
Electronic_ISBN
978-1-4244-9835-2
Type
conf
DOI
10.1109/IWBP.2011.5954858
Filename
5954858
Link To Document