• DocumentCode
    2310040
  • Title

    Femtosecond laser micromachining for the realization of fully integrated optofluidic devices

  • Author

    Osellame, Roberto ; Vazquez, Rebeca Martinez ; Crespi, Andrea ; Cerullo, Giulio ; Ramponi, Roberta

  • Author_Institution
    Dept. of Phys., Politec. di Milano, Milan, Italy
  • fYear
    2011
  • fDate
    8-10 June 2011
  • Firstpage
    1
  • Lastpage
    3
  • Abstract
    Femtosecond laser micromachining is a powerful tool for the fabrication of both optical waveguides and, when followed by chemical etching, of microchannels, with unprecedented intrinsic 3D capabilities. Basics of the technique and examples of fully integrated optofluidic devices are presented.
  • Keywords
    high-speed optical techniques; integrated optics; laser beam etching; laser beam machining; micro-optomechanical devices; microchannel flow; micromachining; optical fabrication; optical waveguides; chemical etching; femtosecond laser micromachining; fully integrated optofluidic devices; microchannels; optical waveguides; Microfluidics; Optical device fabrication; Optical refraction; Optical variables control; Optical waveguides; Ultrafast optics; Waveguide lasers;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    BioPhotonics, 2011 International Workshop on
  • Conference_Location
    Parma
  • Print_ISBN
    978-1-4244-9836-9
  • Electronic_ISBN
    978-1-4244-9835-2
  • Type

    conf

  • DOI
    10.1109/IWBP.2011.5954858
  • Filename
    5954858