Title :
Femtosecond laser micromachining for the realization of fully integrated optofluidic devices
Author :
Osellame, Roberto ; Vazquez, Rebeca Martinez ; Crespi, Andrea ; Cerullo, Giulio ; Ramponi, Roberta
Author_Institution :
Dept. of Phys., Politec. di Milano, Milan, Italy
Abstract :
Femtosecond laser micromachining is a powerful tool for the fabrication of both optical waveguides and, when followed by chemical etching, of microchannels, with unprecedented intrinsic 3D capabilities. Basics of the technique and examples of fully integrated optofluidic devices are presented.
Keywords :
high-speed optical techniques; integrated optics; laser beam etching; laser beam machining; micro-optomechanical devices; microchannel flow; micromachining; optical fabrication; optical waveguides; chemical etching; femtosecond laser micromachining; fully integrated optofluidic devices; microchannels; optical waveguides; Microfluidics; Optical device fabrication; Optical refraction; Optical variables control; Optical waveguides; Ultrafast optics; Waveguide lasers;
Conference_Titel :
BioPhotonics, 2011 International Workshop on
Conference_Location :
Parma
Print_ISBN :
978-1-4244-9836-9
Electronic_ISBN :
978-1-4244-9835-2
DOI :
10.1109/IWBP.2011.5954858
