Development of an automatic virtual metrology framework for TFT-LCD industry

An automatic virtual metrology framework (AVMF) for the TFT-LCD industry is designed and implemented in this paper. The AVMF has capabilities of creating VM models, deploying and refreshing VM models, monitoring and managing VM systems remotely, storing model data and conjectured results centrally, and providing various friendly graphical user interfaces. Pluggable interfaces and functional modules are developed in the AVMF. Thus, by plugging the associated functional module according to desired requirements, the AVMF can be applied to different types of equipment. In turn, applying the AVMF to all pieces of equipment in the factory can be easily achieved. A paradigm AVM system for our cooperative TFT-LCD company is constructed. Integrated testing results show that the paradigm AVMS works smoothly, meets the desired functional requirements, and demonstrates a good performance. It is believed that the developed AVMF can be practically applied in the TFT-LCD industries.