Investigations on an Integrated Optical Position Detection of Micromachined Scanning Mirrors

Author

Schuster, T. ; Sandner, T. ; Lakner, H.

Author_Institution

Commun. Lab., Univ. of Technol., Dresden

fYear

2006

fDate

June 30 2006-July 2 2006

Firstpage

55

Lastpage

58

Abstract

The micro scanning mirrors developed at the Fraunhofer Institute of Photonic Microsystems (IPMS) are a mechanical resonant, electrostatic driven system. The knowledge of the current deflection angle of the mirror plate is necessary to provide stability of the oscillation and to get information about the direction and amplitude of the deflection. Therefore several designs of miniaturized position detection have been developed

Keywords

integrated optics; micro-optomechanical devices; micromechanical resonators; micromirrors; optical design techniques; optical scanners; optical sensors; position measurement; Fraunhofer Institute of Photonic Microsystems; electrostatic driven system; integrated optical position detection; mechanical resonant system; micromachined scanning mirrors; miniaturized position detection designs; oscillation stability; Integrated optics; Mirrors; Optical attenuators; Optical detectors; Optical sensors; Phase detection; Photonics; Resonant frequency; Sensor systems; Voltage;

fLanguage

English

Publisher

ieee

Conference_Titel

Photonics and Microsystems, 2006 International Students and Young Scientists Workshop

Conference_Location

Wroclaw

Print_ISBN

1-4244-0392-8

Electronic_ISBN

1-4244-0393-6

Type

conf

DOI

10.1109/STYSW.2006.343670

Filename

4149609