Title :
Investigations on an Integrated Optical Position Detection of Micromachined Scanning Mirrors
Author :
Schuster, T. ; Sandner, T. ; Lakner, H.
Author_Institution :
Commun. Lab., Univ. of Technol., Dresden
fDate :
June 30 2006-July 2 2006
Abstract :
The micro scanning mirrors developed at the Fraunhofer Institute of Photonic Microsystems (IPMS) are a mechanical resonant, electrostatic driven system. The knowledge of the current deflection angle of the mirror plate is necessary to provide stability of the oscillation and to get information about the direction and amplitude of the deflection. Therefore several designs of miniaturized position detection have been developed
Keywords :
integrated optics; micro-optomechanical devices; micromechanical resonators; micromirrors; optical design techniques; optical scanners; optical sensors; position measurement; Fraunhofer Institute of Photonic Microsystems; electrostatic driven system; integrated optical position detection; mechanical resonant system; micromachined scanning mirrors; miniaturized position detection designs; oscillation stability; Integrated optics; Mirrors; Optical attenuators; Optical detectors; Optical sensors; Phase detection; Photonics; Resonant frequency; Sensor systems; Voltage;
Conference_Titel :
Photonics and Microsystems, 2006 International Students and Young Scientists Workshop
Conference_Location :
Wroclaw
Print_ISBN :
1-4244-0392-8
Electronic_ISBN :
1-4244-0393-6
DOI :
10.1109/STYSW.2006.343670
