High-permittivity thin films for tunable microwave circuits

Author

Stemmer, Susanne ; Lu, Jiwei ; Finstrom, Nicholas H. ; Park, Jaehoon ; Keane, Sean P. ; Pervez, Nadia K. ; Schmidt, Steffen ; Boesch, Damien S. ; Jalan, Bharat ; Klenov, Dmitri O. ; Cagnon, Joel ; York, Robert A.

Author_Institution

Univ. of California, Santa Barbara

fYear

2007

fDate

9-15 June 2007

Firstpage

1721

Lastpage

1724

Abstract

In this presentation we will discuss some of our recent work aimed at elucidating challenges in optimizing materials and devices for high dielectric tunabilities and low losses. We will address the role of nonstoichiometry, electrode interfaces, film stresses and orientation in determining the dielectric properties. We show that dielectric properties must be measured over a wide frequency and temperature range to correctly identify the reasons for the strongly modified properties of thin films.

Keywords

circuit tuning; dielectric losses; dielectric thin films; microwave circuits; permittivity; dielectric losses; dielectric properties; dielectric tunabilities; electrode interfaces; film stresses; high-permittivity thin films; nonstoichiometry; tunable microwave circuits; Dielectric devices; Dielectric losses; Dielectric materials; Dielectric thin films; Electrodes; Microwave circuits; Microwave devices; Stress; Thin film circuits; Tunable circuits and devices;

fLanguage

English

Publisher

ieee

Conference_Titel

Antennas and Propagation Society International Symposium, 2007 IEEE

Conference_Location

Honolulu, HI

Print_ISBN

978-1-4244-0877-1

Electronic_ISBN

978-1-4244-0878-8

Type

conf

DOI

10.1109/APS.2007.4395846

Filename

4395846