• DocumentCode
    2312923
  • Title

    Implementation of accelerometer in CMOS-MEMS

  • Author

    Kuo, Tsung-Chi ; Lai, Shih-Wei ; Kiang, Jean-Fu

  • Author_Institution
    Dept. of Electr. Eng., Nat. Taiwan Univ., Taipei, Taiwan
  • fYear
    2010
  • fDate
    20-22 Oct. 2010
  • Firstpage
    1
  • Lastpage
    3
  • Abstract
    A fully-differential capacitive accelerometer is designed and implemented using TSMC 0.35μm 2P4M CMOS-MEMS process. The measured sensitivity is 53 mV/g.
  • Keywords
    CMOS image sensors; accelerometers; capacitive sensors; CMOS-MEMS process; TSMC; differential capacitive accelerometer; size 0.35 mum; Acceleration; Accelerometers; CMOS integrated circuits; CMOS technology; Capacitance; Micromechanical devices; Sensors;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Microsystems Packaging Assembly and Circuits Technology Conference (IMPACT), 2010 5th International
  • Conference_Location
    Taipei
  • ISSN
    2150-5934
  • Print_ISBN
    978-1-4244-9783-6
  • Electronic_ISBN
    2150-5934
  • Type

    conf

  • DOI
    10.1109/IMPACT.2010.5699592
  • Filename
    5699592
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2312923