Title :
Thermomagnetic residual offset in integrated Hall plates
Author :
Ruther, P. ; Schiller, U. ; Buesser, W. ; Janke, R. ; Paul, O.
Author_Institution :
Inst. for Microsystem Technol., Freiburg Univ., Germany
Abstract :
Integrated Hall plates show self-induced offset due to the current flow in its current leads. The magnetic field surrounding the current leads causes a magnetic offset signal, while their resistive heating causes thermoelectric offset voltages. This paper reports experimental results on these two effects. They are obtained using a novel test structure enabling one to separate the two contributions.
Keywords :
Hall effect transducers; compensation; magnetic sensors; thermomagnetic effects; Hall sensor; current flow; current leads; integrated Hall plates; magnetic field; offset compensation; resistive heating; self-induced offset; test structure; thermoelectric offset voltages; thermomagnetic residual offset; Current measurement; Magnetic field measurement; Magnetic fields; Probes; Resistors; Temperature; Testing; Thermoelectric devices; Thermoelectricity; Voltage measurement;
Conference_Titel :
Sensors, 2002. Proceedings of IEEE
Print_ISBN :
0-7803-7454-1
DOI :
10.1109/ICSENS.2002.1037202
