Miniaturized inductive sensors for industrial applications

Measuring distances, position and travel using the inductive proximity sensors (IPS) based on contactless target-approach detection is a widely used technique. In comparison to optical and capacitive technologies the biggest advantage of inductive sensors in industrial applications is the immunity against oil, water and dirt. In addition, current developments and trends in the industrial fields, especially micro-system and micromechanical applications like robotics and manipulator applications, require small, and fully integrated displacement and position sensors. The new series of Balluff sensors featuring new techniques and technologies, with single sensor calibration, improved accuracy and linearity; in addition excellent temperature stability is "the state of the art" in inductive sensors with complete integrated electronics. The paper includes the latest theoretical considerations and practical realizations about the miniaturized analog and binary inductive sensors for industrial applications, which at the same time show excellent electrical, mechanical and EMC-parameters.