A class of micromachined gyroscopes with increased parametric space

This paper reports a design concept for MEMS gyroscopes based on increasing the degrees-of-freedom of the oscillatory system by the use of two independently oscillating interconnected proof masses. The 4-DOF dynamical system eliminates the necessity for mode-matching due to its wide operation frequency range, and reduces the damping sensitivity problem by operating away from resonance. Thus, inherent disturbance rejection is achieved, providing reduced sensitivity to structural and thermal parameter fluctuations. The basic operational principles of the design concept were experimentally demonstrated, including the wide operation frequency band, and dynamic amplification providing high oscillation amplitudes without resonance.