Title :
Analogic fiber optic position sensor with nanometric resolution
Author :
Lamarque, Frédéric ; Prelle, Christine
Author_Institution :
Lab. Roberval de Mecanique, Univ. de Technol. de Compiegne, France
Abstract :
This paper describes a miniature analogic position sensor. This sensor is dedicated to high resolution displacement measurement (10 nm) between two positions over a long range (a few millimeters). The working principle of the sensor is presented as well as experimental results.
Keywords :
diffraction gratings; displacement measurement; fibre optic sensors; displacement measurement; fiber optic position sensor; nanometric resolution; resolution; Capacitive sensors; Displacement measurement; Mirrors; Optical fiber sensors; Optical fibers; Optical interferometry; Optical sensors; Position measurement; Sensor phenomena and characterization; Size measurement;
Conference_Titel :
Sensors, 2002. Proceedings of IEEE
Print_ISBN :
0-7803-7454-1
DOI :
10.1109/ICSENS.2002.1037233
