Title :
Pressure sensor based on distributed temperature sensing
Author :
van Baar, J.J. ; Wiegerink, R.J. ; Berenschot, J.W. ; Lammerink, T.S.J. ; Krijnen, G.J.M. ; Elwenspoek, M.
Author_Institution :
MESA Res. Inst., Twente Univ., Enschede, Netherlands
Abstract :
A differential pressure sensor has been realized with thermal readout. The thermal readout allows simultaneous measurement of the membrane deflection due to a pressure difference and measurement of the absolute pressure by operating the structure as a Pirani pressure sensor. The measuring of the temperature distribution makes it possible to take the heat transfer to the support in to account and make the measurements independent of the temperature coefficient of resistance of the sensing elements.
Keywords :
distributed sensors; pressure sensors; temperature distribution; thermal conductivity; Pirani pressure sensor; absolute pressure; differential pressure sensor; distributed temperature sensing; heat transfer; membrane deflection; simultaneous measurement; support; temperature distribution; thermal readout; Atmospheric measurements; Biomembranes; Differential equations; Etching; Pressure measurement; Temperature distribution; Temperature sensors; Thermal conductivity; Thermal resistance; Thermal sensors;
Conference_Titel :
Sensors, 2002. Proceedings of IEEE
Print_ISBN :
0-7803-7454-1
DOI :
10.1109/ICSENS.2002.1037240
