Design optimization of three-axis accelerometers based on four seismic masses

Author

Rödjegård, Henrik ; Andersson, Gert

Author_Institution

Imego Inst., Goteborg, Sweden

Volume

2

fYear

2002

fDate

2002

Firstpage

1099

Abstract

This paper presents analytical models for three axis accelerometers based on four seismic masses. The models make it possible to better understand and to predict the behavior of these micro-accelerometers. Cross-axis sensitivity, resolution, frequency response and direction dependence are investigated for a variety of sensing element structures and readout methods. With the maximum sensitivity direction of the individual sensing elements inclined 35.3° with respect to the chip surface the properties becomes direction independent, i.e. identical resolution and frequency response in all directions.

Keywords

accelerometers; frequency response; microsensors; optimisation; sensitivity analysis; cross-axis sensitivity; design optimization; direction dependence; frequency response; microaccelerometers; micromachined accelerometers; readout methods; resolution; seismic masses; sensing element geometries; sensing element structures; sensitivity angle; three axis accelerometers; Acceleration; Accelerometers; Analytical models; Design optimization; Fabrication; Frequency response; Low-frequency noise; Noise level; Particle beams; Predictive models;

fLanguage

English

Publisher

ieee

Conference_Titel

Sensors, 2002. Proceedings of IEEE

Print_ISBN

0-7803-7454-1

Type

conf

DOI

10.1109/ICSENS.2002.1037267

Filename

1037267