DocumentCode
2314005
Title
Long gas-lifetime operation of an ArF excimer laser
Author
Saito, Takashi ; Ito, Satoshi ; Tada, A. ; Arai, Manabu ; Hotta, Kazuhiro
fYear
1994
fDate
28 Aug-2 Sep 1994
Firstpage
63
Lastpage
64
Keywords
Copper; Electrodes; Gain measurement; Gas lasers; Laser modes; Nickel; Optimized production technology; Plasma measurements; Power lasers; Pump lasers;
fLanguage
English
Publisher
ieee
Conference_Titel
Lasers and Electro-Optics Europe, 1994 Conference on
Print_ISBN
0-7803-1789-0
Type
conf
DOI
10.1109/CLEOE.1994.635938
Filename
635938
Link To Document