Title :
Long gas-lifetime operation of an ArF excimer laser
Author :
Saito, Takashi ; Ito, Satoshi ; Tada, A. ; Arai, Manabu ; Hotta, Kazuhiro
fDate :
28 Aug-2 Sep 1994
Keywords :
Copper; Electrodes; Gain measurement; Gas lasers; Laser modes; Nickel; Optimized production technology; Plasma measurements; Power lasers; Pump lasers;
Conference_Titel :
Lasers and Electro-Optics Europe, 1994 Conference on
Print_ISBN :
0-7803-1789-0
DOI :
10.1109/CLEOE.1994.635938
