Title :
Microsystems based on surface micromachined mechanisms
Author :
Oliver, Andrew D. ; Peter, Frank J. ; Polosky, Marc A.
Author_Institution :
Electromech. Eng. Dept., Sandia Nat. Labs., Albuquerque, NM, USA
Abstract :
In this paper, we describe some of the design considerations that turn a surface micromachined mechanism from a technological curiosity into a functional and useful device. Some relevant factors include: device design, actuators, drive signals, and packaging. The paper concludes with two example microsystems.
Keywords :
micromachining; micromechanical devices; semiconductor device packaging; MEMS; actuators; design considerations; drive signals; microsystems; packaging; surface micromachined mechanisms; Actuators; Electrostatics; Micromachining; Packaging; Protection; Rough surfaces; Silicon; Surface discharges; Surface roughness; Voltage;
Conference_Titel :
Sensors, 2002. Proceedings of IEEE
Print_ISBN :
0-7803-7454-1
DOI :
10.1109/ICSENS.2002.1037283
