Title :
The role of structural factor in In2O3 gas response
Author :
Cornet, A. ; Morante, J. ; Cabot, A. ; Arbiol, J. ; Golovanov, V.
Author_Institution :
Barcelona Univ., Spain
Abstract :
In this paper we examined the influence of In2O3 film structure on their gas sensing characteristics. Films were deposited by spray pyrolysis from InCl3-water solutions. Regularities of a correlation between gas sensing parameters and such structural parameters as film thickness, grain size, refraction index, and texturing were established. Some requirements of the In2O3 film structure for a gas sensor, designed for detection of both reducing and oxidizing gases, were formulated as well.
Keywords :
gas sensors; grain size; indium compounds; porosity; pyrolysis; refractive index; semiconductor materials; semiconductor thin films; spray coatings; surface texture; In2O3; In2O3 film structure; InCl3; InCl3-H2O; InCl3-water solutions; film thickness; gas sensing characteristics; grain size; oxidizing gases; reducing gases; refraction index; semiconductor gas sensors; spray pyrolysis; structural parameters; texture; Atmosphere; Atmospheric measurements; Crystallization; Grain size; Microelectronics; Optical films; Spraying; Structural engineering; Temperature; X-ray scattering;
Conference_Titel :
Sensors, 2002. Proceedings of IEEE
Print_ISBN :
0-7803-7454-1
DOI :
10.1109/ICSENS.2002.1037288
