• DocumentCode
    2314297
  • Title

    The role of structural factor in In2O3 gas response

  • Author

    Cornet, A. ; Morante, J. ; Cabot, A. ; Arbiol, J. ; Golovanov, V.

  • Author_Institution
    Barcelona Univ., Spain
  • Volume
    2
  • fYear
    2002
  • fDate
    2002
  • Firstpage
    1214
  • Abstract
    In this paper we examined the influence of In2O3 film structure on their gas sensing characteristics. Films were deposited by spray pyrolysis from InCl3-water solutions. Regularities of a correlation between gas sensing parameters and such structural parameters as film thickness, grain size, refraction index, and texturing were established. Some requirements of the In2O3 film structure for a gas sensor, designed for detection of both reducing and oxidizing gases, were formulated as well.
  • Keywords
    gas sensors; grain size; indium compounds; porosity; pyrolysis; refractive index; semiconductor materials; semiconductor thin films; spray coatings; surface texture; In2O3; In2O3 film structure; InCl3; InCl3-H2O; InCl3-water solutions; film thickness; gas sensing characteristics; grain size; oxidizing gases; reducing gases; refraction index; semiconductor gas sensors; spray pyrolysis; structural parameters; texture; Atmosphere; Atmospheric measurements; Crystallization; Grain size; Microelectronics; Optical films; Spraying; Structural engineering; Temperature; X-ray scattering;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Sensors, 2002. Proceedings of IEEE
  • Print_ISBN
    0-7803-7454-1
  • Type

    conf

  • DOI
    10.1109/ICSENS.2002.1037288
  • Filename
    1037288
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2314297