• DocumentCode
    2314897
  • Title

    Nanoscale energy generation characteristics of piezoelectric thin films

  • Author

    Bhaskaran, Madhu ; Sriram, Sharath ; Ruffell, Simon ; Mitchell, Arnan

  • Author_Institution
    Microplatforms Res. Group, RMIT Univ., Melbourne, VIC, Australia
  • fYear
    2010
  • fDate
    12-15 Dec. 2010
  • Firstpage
    149
  • Lastpage
    150
  • Abstract
    The use of nanoindentation to characterize in situ the voltage and current generation of piezoelectric thin films is reported for the first time. Continuous thin films and lithographically patterned nanoislands with limited interaction area have been characterised. The influence of size on energy generation parameters is reported, with the demonstration that nanoislands can exhibit more effective current generation.
  • Keywords
    island structure; lead compounds; nanofabrication; nanoindentation; nanolithography; nanostructured materials; piezoelectric thin films; sputter deposition; strontium compounds; (Pb0.92Sr0.08)(Zr0.65Ti0.35)O3; RF magnetron sputter deposition; current generation; energy generation parameters; lithographically patterned nanoislands; nanoindentation; nanoscale energy generation properties; piezoelectric thin films; voltage generation; Manganese; Titanium;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Optoelectronic and Microelectronic Materials and Devices (COMMAD), 2010 Conference on
  • Conference_Location
    Canberra, ACT
  • ISSN
    1097-2137
  • Print_ISBN
    978-1-4244-7334-2
  • Electronic_ISBN
    1097-2137
  • Type

    conf

  • DOI
    10.1109/COMMAD.2010.5699710
  • Filename
    5699710
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2314897