Title :
Nanoscale energy generation characteristics of piezoelectric thin films
Author :
Bhaskaran, Madhu ; Sriram, Sharath ; Ruffell, Simon ; Mitchell, Arnan
Author_Institution :
Microplatforms Res. Group, RMIT Univ., Melbourne, VIC, Australia
Abstract :
The use of nanoindentation to characterize in situ the voltage and current generation of piezoelectric thin films is reported for the first time. Continuous thin films and lithographically patterned nanoislands with limited interaction area have been characterised. The influence of size on energy generation parameters is reported, with the demonstration that nanoislands can exhibit more effective current generation.
Keywords :
island structure; lead compounds; nanofabrication; nanoindentation; nanolithography; nanostructured materials; piezoelectric thin films; sputter deposition; strontium compounds; (Pb0.92Sr0.08)(Zr0.65Ti0.35)O3; RF magnetron sputter deposition; current generation; energy generation parameters; lithographically patterned nanoislands; nanoindentation; nanoscale energy generation properties; piezoelectric thin films; voltage generation; Manganese; Titanium;
Conference_Titel :
Optoelectronic and Microelectronic Materials and Devices (COMMAD), 2010 Conference on
Conference_Location :
Canberra, ACT
Print_ISBN :
978-1-4244-7334-2
Electronic_ISBN :
1097-2137
DOI :
10.1109/COMMAD.2010.5699710
