Title :
SOI CMOS compatible low-power microheater optimization and fabrication for smart gas sensor implementations
Author :
Laconte, J. ; Dupont, C. ; Flandre, D. ; Raskin, J.P.
Author_Institution :
Res. Center in Micro & Nanoscopic Electron. Devices & Mater. (CeRMIN), Univ. Catholique de Louvain, Louvain-la-Neuve, Belgium
Abstract :
In this paper, an original design of a polysilicon loop-shaped microheater on a thin stacked dielectric membrane is presented. This design ensures high thermal uniformity and insulation (20.000°C/W) and very low power consumption (20 mW for heating at 400°C). Moreover, the use of completely CMOS compatible TMAH-based bulk-micromachining techniques allows an easy smart gas sensor integration in SOI-CMOS technology.
Keywords :
CMOS integrated circuits; elemental semiconductors; gas sensors; intelligent sensors; low-power electronics; micromachining; microsensors; silicon; silicon-on-insulator; 20 mW; 400 degC; SOI CMOS compatible device; Si; TMAH-based bulk-micromachining; low-power microheater optimization; polysilicon loop-shaped microheater; power consumption; smart gas sensor; tetramethyl ammonium hydroxide; thermal uniformity; thin stacked dielectric membrane; Aluminum; Biomembranes; Dielectric materials; Dielectric substrates; Electronic packaging thermal management; Fabrication; Gas detectors; Laboratories; Residual stresses; Silicon on insulator technology;
Conference_Titel :
Sensors, 2002. Proceedings of IEEE
Print_ISBN :
0-7803-7454-1
DOI :
10.1109/ICSENS.2002.1037325
