• DocumentCode
    2315020
  • Title

    Single-chip CMOS capacitive gas sensor for detection of volatile organic compounds

  • Author

    Hagleitner, C. ; Hierlemann, A. ; Baltes, H.

  • Author_Institution
    Phys. Electron. Lab., ETH Zurich, Switzerland
  • Volume
    2
  • fYear
    2002
  • fDate
    2002
  • Firstpage
    1428
  • Abstract
    We present interface circuitry for a novel CMOS gas detection system based on a capacitive microsensor for the detection of airborne volatile organic compounds (VOCs). The system achieves an accuracy more than 18 bits at a bandwidth of 0.7 Hz, which corresponds to a detection limit of, e.g., 2 ppm for ethanol. The system does not any need accurate external voltage or current references and includes a serial interface (I2C-bus) to set the parameters and transmit the acquired data to an external data processing unit.
  • Keywords
    CMOS integrated circuits; capacitive sensors; gas sensors; microsensors; 0.7 Hz; CMOS; I2C-bus; accuracy; airborne volatile organic compounds; capacitive gas sensor; capacitive microsensor; detection limit; ethanol; external data processing unit; interface circuitry; serial interface; Absorption; CMOS process; Capacitors; Electrodes; Equivalent circuits; Gas detectors; Laboratories; Microsensors; Polymers; Volatile organic compounds;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Sensors, 2002. Proceedings of IEEE
  • Print_ISBN
    0-7803-7454-1
  • Type

    conf

  • DOI
    10.1109/ICSENS.2002.1037331
  • Filename
    1037331