DocumentCode
2315020
Title
Single-chip CMOS capacitive gas sensor for detection of volatile organic compounds
Author
Hagleitner, C. ; Hierlemann, A. ; Baltes, H.
Author_Institution
Phys. Electron. Lab., ETH Zurich, Switzerland
Volume
2
fYear
2002
fDate
2002
Firstpage
1428
Abstract
We present interface circuitry for a novel CMOS gas detection system based on a capacitive microsensor for the detection of airborne volatile organic compounds (VOCs). The system achieves an accuracy more than 18 bits at a bandwidth of 0.7 Hz, which corresponds to a detection limit of, e.g., 2 ppm for ethanol. The system does not any need accurate external voltage or current references and includes a serial interface (I2C-bus) to set the parameters and transmit the acquired data to an external data processing unit.
Keywords
CMOS integrated circuits; capacitive sensors; gas sensors; microsensors; 0.7 Hz; CMOS; I2C-bus; accuracy; airborne volatile organic compounds; capacitive gas sensor; capacitive microsensor; detection limit; ethanol; external data processing unit; interface circuitry; serial interface; Absorption; CMOS process; Capacitors; Electrodes; Equivalent circuits; Gas detectors; Laboratories; Microsensors; Polymers; Volatile organic compounds;
fLanguage
English
Publisher
ieee
Conference_Titel
Sensors, 2002. Proceedings of IEEE
Print_ISBN
0-7803-7454-1
Type
conf
DOI
10.1109/ICSENS.2002.1037331
Filename
1037331
Link To Document