Title :
Large area metal-silicone flexible electronic structures
Author :
Shah, Charan M. ; Sriram, Sharath ; Bhaskaran, Madhu ; Mitchell, Arnan
Author_Institution :
Microplatforms Res. Group, RMIT Univ., Melbourne, VIC, Australia
Abstract :
Conductive structures on flexible substrates are expected to be the foundation of the next generation of electronics, displays, and solar cells. This work presents a simplified fabrication process for definition of electrode structures on silicone polymer. Flexible gold thin film structures on polydimethyl siloxane (PDMS) were successfully realised. This process is conducive to large area fabrication of flexible electrode structures, for incorporation with microfluidics, and for conformal adhesion to non-planar surfaces.
Keywords :
adhesion; conducting materials; electrodes; electron beam deposition; flexible electronics; gold; metallic thin films; microfabrication; Au; conductive structures; conformal adhesion; electrode structures; electron beam evaporation; flexible electronic structures; flexible gold thin film; flexible substrates; large area metal-silicone; microfluidics; nonplanar surfaces; polydimethyl siloxane; silicone polymer; solar cells; Aluminum; Gold; Silicon; Substrates;
Conference_Titel :
Optoelectronic and Microelectronic Materials and Devices (COMMAD), 2010 Conference on
Conference_Location :
Canberra, ACT
Print_ISBN :
978-1-4244-7334-2
Electronic_ISBN :
1097-2137
DOI :
10.1109/COMMAD.2010.5699731
