• DocumentCode
    2315939
  • Title

    Fabrication of low loss Chalcogenide glass waveguide via thermal nanoimprint lithography

  • Author

    Han, T. ; Madden, S. ; Bulla, Douglas ; Luther-Davies, Barry

  • Author_Institution
    Centre for Ultrahigh Bandwidth Devices for Opt. Syst., Australian Nat. Univ., Canberra, ACT, Australia
  • fYear
    2010
  • fDate
    12-15 Dec. 2010
  • Firstpage
    53
  • Lastpage
    54
  • Abstract
    We report the fabrication of Chalcogenide glass rib waveguides by thermal nano-imprint. Waveguides 2-4μm wide and 1μm high were fabricated with optical losses of 0.26dB/cm and 0.27dB/cm for TM and TE polarizations at 1550nm.
  • Keywords
    arsenic compounds; chalcogenide glasses; light polarisation; nanolithography; optical fabrication; optical glass; optical losses; optical waveguides; rib waveguides; selenium compounds; semiconductor growth; soft lithography; sulphur compounds; As24S38Se38; TE polarization; TM polarization; chalcogenide glass rib waveguides; optical losses; size 2 mum to 4 mum; thermal nanoimprint lithography; Chemical elements; Lead; Optical device fabrication; Optical polarization; Optical waveguides;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Optoelectronic and Microelectronic Materials and Devices (COMMAD), 2010 Conference on
  • Conference_Location
    Canberra, ACT
  • ISSN
    1097-2137
  • Print_ISBN
    978-1-4244-7334-2
  • Electronic_ISBN
    1097-2137
  • Type

    conf

  • DOI
    10.1109/COMMAD.2010.5699775
  • Filename
    5699775
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2315939