Title :
A hybridised, multi-channel, charged-particle detecting and counting array
Author :
Hatfield, J. ; Comer, J ; York, T. ; Hicks, P.
Author_Institution :
Univ. of Manchester Inst. of Sci. & Technol., UK
Abstract :
A hybrid circuit is reported which is a novel position-sensitive charged-particle detector. Multiple-anode integrated detectors (MAIDs) have been developed which consist of an array of electron sensing anodes and a corresponding array of amplifiers and counters all integrated on a single chip. The anodes are fabricated on the surface of the chip over a thick dielectric film. The active anode array can be arbitrarily extended by abutting individual MAIDs side-by-side, under the control of a customizing master ULA. When mounted with a microchannel plate multiplier, the device counts individual particles or photons
Keywords :
CMOS integrated circuits; electron detection and measurement; hybrid integrated circuits; image intensifiers; photon counting; position sensitive particle detectors; semiconductor counters; MAIDs; active anode array; array of amplifiers; array of electron sensing anodes; counts individual particles; customizing master ULA; hybrid IC; microchannel plate multiplier; multiple anode integrated detectors; particle counting circuit; photon counting circuit; position-sensitive charged-particle detector; thick dielectric film; Anodes; Counting circuits; Detectors; Dielectric films; Electrodes; Electrons; Microchannel; Sensor arrays; Spatial resolution; Spectroscopy;
Conference_Titel :
Custom Integrated Circuits Conference, 1990., Proceedings of the IEEE 1990
Conference_Location :
Boston, MA
DOI :
10.1109/CICC.1990.124748
