• DocumentCode
    2316484
  • Title

    Development of THz ellipsometer with variable incident angle

  • Author

    Matsumoto, Naoki ; Nagashima, Takeshi ; Fujii, Takashi ; Takagi, Hiroshi ; Hangyo, Masanori

  • Author_Institution
    Murata Manuf. Co. Ltd., Nagaokakyo, Japan
  • fYear
    2009
  • fDate
    21-25 Sept. 2009
  • Firstpage
    1
  • Lastpage
    2
  • Abstract
    We have developed a THz ellipsometer with a variable incident angle based on the time-domain spectroscopy. The dielectric responses of soft-phonon mode in SrTiO3 bulk single crystal and 1 mum thick thin film grown on Pt/MgO substrates are demonstrated.
  • Keywords
    ellipsometers; magnesium compounds; permittivity; phonons; platinum compounds; strontium compounds; substrates; terahertz spectroscopy; time-domain analysis; titanium compounds; Pt-MgO; SrTiO3; THz ellipsometer; dielectric response; size 1 mum; soft-phonon mode; substrate; thin film growth; time-domain spectroscopy; variable incident angle; Crystalline materials; Dielectric measurements; Dielectric substrates; Dielectric thin films; Ellipsometry; High K dielectric materials; Mirrors; Polarization; Semiconductor materials; Time domain analysis;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Infrared, Millimeter, and Terahertz Waves, 2009. IRMMW-THz 2009. 34th International Conference on
  • Conference_Location
    Busan
  • Print_ISBN
    978-1-4244-5416-7
  • Electronic_ISBN
    978-1-4244-5417-4
  • Type

    conf

  • DOI
    10.1109/ICIMW.2009.5324722
  • Filename
    5324722
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2316484