Development of an LTEM prototype system for LSI failure analysis

Author

Yamashita, Masatsugu ; Otani, Chiko ; Kim Sunmi ; Murakmai, Hironaru ; Tonouchi, Masayoshi ; Matsumoto, Toru ; Midoh, Yoshihiro ; Miura, Katsuyoshi ; Nakamae, Koji ; Nikaw, Kiyoshi

Author_Institution

RIKEN Terahertz sensing & Imaging team, Sendai, Japan

fYear

2009

fDate

21-25 Sept. 2009

Firstpage

1

Lastpage

2

Abstract

We have developed a prototype system of a laser THz emission microscope (LTEM) for inspecting electrical failures in large-scale integrated circuits (LSIs). LTEM measures the THz emission images on LSIs by exciting the p-n junctions with ultra fast laser pulses. Without any electrical probing, we successfully identified interconnection built-in defects such as open or short circuit in C7552 ISCAS´85 benchmark circuits using the prototype system.

Keywords

failure analysis; large scale integration; terahertz wave imaging; LSI failure analysis; THz emission image; electrical failures; electrical probing; large scale integrated circuits; laser THz emission microscope; prototype system; Failure analysis; Inspection; Integrated circuit interconnections; Large scale integration; Laser excitation; Lenses; Optical pulses; P-n junctions; Photoconductivity; Prototypes;

fLanguage

English

Publisher

ieee

Conference_Titel

Infrared, Millimeter, and Terahertz Waves, 2009. IRMMW-THz 2009. 34th International Conference on

Conference_Location

Busan

Print_ISBN

978-1-4244-5416-7

Electronic_ISBN

978-1-4244-5417-4

Type

conf

DOI

10.1109/ICIMW.2009.5324744

Filename

5324744