Title :
Calculation of electric field of experimentally obtained nanoscale field emission structures
Author :
Solntsev, V.A. ; Rodionov, A.N. ; Tatarenko, N.I.
Author_Institution :
Inst. of Electron. & Math., Moscow, Russia
Abstract :
The electric field strength and gain have been calculated for a nanostructural field emission array (FEA), the structure and fabrication technology of which differed principally from the conventional Spindt FEA. The forming of regular nanoscale titanium tips incorporated into cylindrical nanochannels of a dielectric layer of a porous anodic alumina was possible due to the thin-film system self-organization at the nanolevel in the process of its electrochemical anodizing.
Keywords :
electric fields; electron field emission; nanotechnology; vacuum microelectronics; electric field; electrochemical anodization; field emission array; gain; nanoscale titanium tip; porous anodic alumina dielectric layer; self-organization; thin film system; Anodes; Electrodes; Field emitter arrays; Microelectronics; Nanoscale devices; Nanostructures; Superconducting thin films; Thin film devices; Titanium; Voltage;
Conference_Titel :
Vacuum Microelectronics Conference, 1998. Eleventh International
Conference_Location :
Asheville, NC, USA
Print_ISBN :
0-7803-5096-0
DOI :
10.1109/IVMC.1998.728621
