Calibration accuracy of a 625 GHz on-wafer probe

Author

Reck, Theodore J. ; Lihan Chen ; Chunhu Zhang ; Arsenovic, Alexander ; Lichtenberger, Arthur ; Weikle, Robert M. ; Barker, N.S.

Author_Institution

Charles L. Brown Dept. of Electr. Eng., Univ. of Virginia, Charlottesville, VA, USA

fYear

2010

fDate

Nov. 30 2010-Dec. 3 2010

Firstpage

1

Lastpage

5

Abstract

The accuracy of an on-wafer probe system operating at 625 GHz is analyzed. A weighted least squares analysis is applied to the calibration of a one-port measurement system to propagate the non-systematic errors introduced by probe contact and probe placement variation. The worst-case errors of the 625 GHz on-wafer probe system are found and the combined effects of the VNA extender´s power drop-out at the low end of the band with the poor matching of the probe at the high-end results in the 625 GHz probe system being most accurate in the center of the WR-1.5 waveguide band. Between 560 and 625 GHz the worst case error is 0.26 in linear magnitude and 15° in phase for a 0 dB reflection.

Keywords

calibration; least squares approximations; measurement errors; measurement systems; network analysers; probes; semiconductor device measurement; submillimetre wave measurement; waveguides; VNA extender power drop-out; WR-1.5 waveguide band; calibration accuracy; frequency 625 GHz; least squares analysis; nonsystematic error; on-wafer probe system; one-port measurement system; probe contact; probe placement variation; worst-case error;

fLanguage

English

Publisher

ieee

Conference_Titel

Microwave Measurement Symposium (ARFTG), 2010 76th ARFTG

Conference_Location

Clearwater Beach, FL

Print_ISBN

978-1-4244-7447-9

Type

conf

DOI

10.1109/ARFTG76.2010.5700054

Filename

5700054