Title :
A low-voltage, low-capacitance, vertical multi-layer thin-film-edge dispenser field emitter array electron source
Author :
Hsu, David S.Y. ; Gray, Henry F.
Author_Institution :
Naval Res. Lab., Washington, DC, USA
Abstract :
A new low-voltage low-capacitance field emitter array (FEA) electron source has been developed for field emitter displays (FEDs) and high frequency power amplifiers. The new FEA cell has a horizontal gate and a vertical multi-layer thin-film low work function dispenser edge emitter made by sandwiching a lithium thin-film between two noble metal thin-films.
Keywords :
electron field emission; electron sources; vacuum microelectronics; electron source; field emitter array; low-voltage low-capacitance device; vertical multilayer thin film edge dispenser; Apertures; Chemical vapor deposition; Current-voltage characteristics; Electron sources; Fabrication; Field emitter arrays; Lithium; Low voltage; Sputtering; Transistors;
Conference_Titel :
Vacuum Microelectronics Conference, 1998. Eleventh International
Conference_Location :
Asheville, NC, USA
Print_ISBN :
0-7803-5096-0
DOI :
10.1109/IVMC.1998.728650
