DocumentCode
2318578
Title
Data and numerical analysis of FEA experiments with linear planar lenses
Author
Tang, Cha-Mei
Author_Institution
Creatv Micro Tech. Inc., Potomac, MD, USA
fYear
1998
fDate
19-24 July 1998
Firstpage
96
Abstract
Summary form only given. Conventional gated field-emitter arrays (FEAs) typically emit electrons with wide angular spread. Our experiments show that a line of gated field-emitters emit a collimated sheet beam of electrons. The configuration that produces these results consists of a line of gated FEAs with focusing provided by lenses on either side of the gate electrode and coplanar with the gate electrode. The full-width-half-maximum of the beam is less than 35 microns, when measured at the anode 10 mm from the cathode. This is a reduction of the width of the beam by about a factor of hundred as compared to the width of the beam when no focusing field is applied. The results indicate that integrated focusing lenses can be very effective in collimating the electron beam from gated field emitters. The FEAs were fabricated by MCNC.
Keywords
electron beam focusing; electron field emission; electron lenses; vacuum microelectronics; FEA; electron collimation; field emitter array; integrated focusing lens; linear planar lens; Anodes; Cathodes; Collimators; Electrodes; Electron emission; Field emitter arrays; Lakes; Lenses; NIST; Numerical analysis;
fLanguage
English
Publisher
ieee
Conference_Titel
Vacuum Microelectronics Conference, 1998. Eleventh International
Conference_Location
Asheville, NC, USA
Print_ISBN
0-7803-5096-0
Type
conf
DOI
10.1109/IVMC.1998.728657
Filename
728657
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