Measured performance of silicon field emitter arrays in gaseous ambients

Silicon field emitter arrays fabricated at MCNC have demonstrated repeatable and stable operation at base pressure (5/spl times/10/sup -9/ Torr range). While it is relatively straightforward to maintain such vacuum conditions in the laboratory, in practical applications there will always be an ambient gas of some composition and pressure due to imperfect sealing of the vacuum envelope, permeation, and outgassing of the components under use. It is well known in a qualitative sense that the test environment can significantly affect the electrical performance of a field emission device. This work attempts to quantify the effect of exposure on silicon field emitter arrays operating in different ambient pressures and compositions.