• DocumentCode
    2318716
  • Title

    Estimation of tip´s resistance from measured I-V plots of emission current

  • Author

    Bormatova, L. ; Galdetskiy, A. ; Zhirnov, V.

  • Author_Institution
    Inst. of Crystallogr., Moscow, Russia
  • fYear
    1998
  • fDate
    19-24 July 1998
  • Firstpage
    107
  • Lastpage
    108
  • Abstract
    A technique of estimation of tip´s resistance is considered. It is based measuring of deviation of emission current I-V plot from Fowler-Nordheim curve. Some results are presented on resistance measurements for silicon whiskers grown by vapor-liquid-solid technique and having various coatings. Resistance of Ni-coated tips is in the range 0.8-1.2 10/sup 8/ Ohm.
  • Keywords
    electric resistance measurement; electron field emission; elemental semiconductors; silicon; vacuum microelectronics; whiskers (crystal); FEA tip; Fowler-Nordheim curve; I-V characteristics; Si-Ni; emission current; nickel coating; resistance measurement; silicon whisker; vapor-liquid-solid growth; Coatings; Crystallography; Current density; Current measurement; Electrical resistance measurement; Flat panel displays; Least squares approximation; Silicon; Surface resistance; Voltage measurement;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Vacuum Microelectronics Conference, 1998. Eleventh International
  • Conference_Location
    Asheville, NC, USA
  • Print_ISBN
    0-7803-5096-0
  • Type

    conf

  • DOI
    10.1109/IVMC.1998.728664
  • Filename
    728664