Title :
A surface and bulk micromachined angular vertical combdrive for scanning micromirrors
Author :
Piyawattanametha, W. ; Patterson, P. ; Wu, M. ; Hah, D. ; Toshiyoshi, H.
Author_Institution :
Dept. of Electr. Eng., California Univ., Los Angeles, CA, USA
Abstract :
We present a high performance scanning micromirror with angular vertical comb actuators realized by combining MUMPs with a 3-mask deep-reactive-ion-etching post process. A DC scan angle of ±4° (mechanical) is achieved at 40 V.
Keywords :
microactuators; micromachining; micromirrors; optical scanners; sputter etching; 3-mask deep-reactive-ion-etching post process; 40 V; DC scan angle; angular vertical comb actuators; bulk micromachined angular vertical combdrive; multiuser MEMS processes; scanning micromirrors; surface micromachined angular vertical combdrive; Actuators; Application specific integrated circuits; Automatic voltage control; Etching; Fabrication; Integrated circuit technology; Micromachining; Micromirrors; Mirrors; Springs;
Conference_Titel :
Optical Fiber Communications Conference, 2003. OFC 2003
Print_ISBN :
1-55752-746-6
DOI :
10.1109/OFC.2003.1247635
