Title :
Computer-controlled field emission testing system for mapping of emission and photo-current with submicron spatial resolution
Author :
Koellner, C. ; Kim, U. ; Aslam, D.M. ; Veerasamy, V.S.
Author_Institution :
Kaiserslautern Univ., Germany
Abstract :
A computer controlled field emission testing system has been built for large area lateral mapping of field emission current from polycrystalline diamond and diamondlike carbon (DLC) thin films. Such a system capable of submicrometer resolution is equipped with an optical microscope, residual gas analyzer and an Auger system.
Keywords :
automatic test equipment; electron field emission; vacuum microelectronics; Auger system; C; computer-controlled testing system; diamondlike carbon thin film; field emission current; large area lateral mapping; optical microscope; photocurrent; polycrystalline diamond thin film; residual gas analyzer; submicron spatial resolution; Anodes; Control systems; Data acquisition; Optical films; Optical imaging; Optical microscopy; Probes; Spatial resolution; System testing; Vacuum systems;
Conference_Titel :
Vacuum Microelectronics Conference, 1998. Eleventh International
Conference_Location :
Asheville, NC, USA
Print_ISBN :
0-7803-5096-0
DOI :
10.1109/IVMC.1998.728668
