Title :
MOSFET-structured Si emitter tips with a focusing lens
Author :
Itoh, Junji ; Kagawa, Yoshitaka ; Kanemaru, Seigo
Author_Institution :
Electrotech. Lab., Tsukuba, Japan
Abstract :
In this paper, we present a newly-developed emitter structure consisting of a double-gated tip and a built-in metal-insulator-semiconductor field-effect-transistor (MOSFET-gun). This idea is based on remarkable results on the emission current stabilization recently obtained with a MOSFET-tip.
Keywords :
MOSFET; electron beam focusing; electron field emission; electron guns; electron lenses; elemental semiconductors; silicon; vacuum microelectronics; MOSFET gun; Si; Si field emitter; double-gated tip; electron beam; emission current stability; focusing lens; Electron beams; Electron emission; Electronic mail; Laboratories; Lenses; MOSFET circuits; Silicon; Stability; Virtual colonoscopy; Voltage control;
Conference_Titel :
Vacuum Microelectronics Conference, 1998. Eleventh International
Conference_Location :
Asheville, NC, USA
Print_ISBN :
0-7803-5096-0
DOI :
10.1109/IVMC.1998.728675
