Title :
100 nm gate aperture field emitter arrays
Author :
Pflug, David G. ; Schattenburg, Mark ; Akinwande, Akintunde I. ; Smith, Henry I.
Author_Institution :
MIT, Cambridge, MA, USA
Abstract :
We report the results of experimental and numerical simulation studies of the scaling of FEA gate apertures. Numerical simulation of "realistic" device structures was performed using a commercially available electrostatic simulator and custom written software. Our device simulations indicate that FEAs will operate with a gate to emitter voltage below 15 V if the gate aperture is scaled to 100 nm. At this operating voltage the FEA can provide an array current density of at least 10 /spl mu/A/cm/sup 2/ which should be adequate for use in a notebook computer type flat panel display.
Keywords :
electron field emission; vacuum microelectronics; 100 nm; 15 V; current density; custom software; electrostatic simulator; field emitter array; gate aperture scaling; numerical simulation; Anodes; Apertures; Current density; Electrostatic measurements; Field emitter arrays; Flat panel displays; Geometry; Numerical simulation; Resists; Voltage;
Conference_Titel :
Vacuum Microelectronics Conference, 1998. Eleventh International
Conference_Location :
Asheville, NC, USA
Print_ISBN :
0-7803-5096-0
DOI :
10.1109/IVMC.1998.728676