DocumentCode
2319372
Title
Observation of a new type of field-induced electron emission from a diamond-based heterostructure
Author
Chen, J. ; Deng, S.Z. ; Xu, N.S. ; Wu, K.H. ; Wang, E.G.
Author_Institution
Dept. of Phys., Zhongshan Univ., Guangzhou, China
fYear
1998
fDate
19-24 July 1998
Firstpage
174
Lastpage
175
Abstract
The nitrogen-doped diamond films were deposited on Mo substrates by Microwave Plasma Enhanced CVD using N/sub 2//CH/sub 4/, as feedstock. A two-layer structure consisting of a a-Mo/sub 2/C buffer layer and diamond film was formed. Their field-induced electron emission characteristics, i.e., I-V characteristics and distribution of emission sites were studied using the Transparent Anode Imaging Technique. Repeatable abrupt change of "on" and "off" states of emission was observed at two corresponding specific fields during circling of both increasing and decreasing applied gap field. A plausible explanation is given to this new type of field-induced electron emission phenomenon.
Keywords
diamond; electron field emission; plasma CVD coatings; C:N-Mo/sub 2/C; I-V characteristics; Mo substrate; a-Mo/sub 2/C buffer layer; field-induced electron emission; heterostructure; microwave plasma enhanced CVD; nitrogen-doped diamond film; transparent anode imaging; Anodes; Breakdown voltage; Buffer layers; Electric breakdown; Electron emission; Nitrogen; Nuclear and plasma sciences; Physics; Plasma properties; Substrates;
fLanguage
English
Publisher
ieee
Conference_Titel
Vacuum Microelectronics Conference, 1998. Eleventh International
Conference_Location
Asheville, NC, USA
Print_ISBN
0-7803-5096-0
Type
conf
DOI
10.1109/IVMC.1998.728700
Filename
728700
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