Fabrication of microcantilever arrays using sol-gel PZT thin film for nanopositioning

Author

Hong Zhu ; Min Zhou ; Bangtao Chen ; Jianmin Miao

Author_Institution

Sch. of Mech. & Production Eng., Nanyang Technol. Univ., Singapore

fYear

2002

fDate

27-29 Aug. 2002

Abstract

Lead zirconate titanate (PZT) piezoelectric thin films have been prepared by the sol-gel method to fabricate microcantilever arrays for nano-actuation with potential applications in hard disk drives. Film annealing temperature and time is critical to the preparation of the sol-gel thin film. The fabrication process of microcantilever arrays in planar structure is presented. Key issues for the fabrication of the cantilever are: the compatible etching process of PZT thin film, and the compensation of thin film stress in all layers to obtain a flat multiple layer structure.

Keywords

annealing; disc drives; etching; hard discs; internal stresses; lead compounds; microactuators; micromachining; nanopositioning; piezoelectric actuators; piezoelectric thin films; surface topography; PZT compatible etching process; PZT-Si; PbZrO3TiO3-Si; Si; annealing temperature; annealing time; flat multiple layer structure; hard disk drive applications; lead zirconate titanate piezoelectric thin films; microcantilever array fabrication; nano-actuation; nanopositioning; planar structure; silicon microcantilever; sol-gel PZT thin film; thin film stress compensation; Annealing; Etching; Fabrication; Hard disks; Nanopositioning; Piezoelectric films; Stress; Temperature; Titanium compounds; Transistors;

fLanguage

English

Publisher

ieee

Conference_Titel

Magnetic Recording Conference, 2002. Digest of the Asia-Pacific

Conference_Location

Singapore

Print_ISBN

0-7803-7509-2

Type

conf

DOI

10.1109/APMRC.2002.1037698

Filename

1037698