DocumentCode
2320153
Title
Determination of Young´s modulus of bulk single crystal silicon by C-V measurement
Author
Qinghua Li ; Yi Lu ; Shixin Chen
Author_Institution
Data Storage Inst., Singapore
fYear
2002
fDate
27-29 Aug. 2002
Abstract
In this paper, in order to measure the Young´s modulus of bulk single crystal silicon, a linear microactuator is designed and fabricated. C-V curve is measured and the Young´s modulus is extracted. The result agrees well with the data published.
Keywords
Young´s modulus; elastic moduli measurement; elemental semiconductors; microactuators; silicon; C-V measurement; Si; Young´s modulus; bulk single crystal silicon; linear microactuator; Actuators; Bandwidth; Capacitance; Capacitance-voltage characteristics; Fingers; Microactuators; Servomechanisms; Silicon; Springs; Stators;
fLanguage
English
Publisher
ieee
Conference_Titel
Magnetic Recording Conference, 2002. Digest of the Asia-Pacific
Conference_Location
Singapore
Print_ISBN
0-7803-7509-2
Type
conf
DOI
10.1109/APMRC.2002.1037702
Filename
1037702
Link To Document