Title :
Determination of Young´s modulus of bulk single crystal silicon by C-V measurement
Author :
Qinghua Li ; Yi Lu ; Shixin Chen
Author_Institution :
Data Storage Inst., Singapore
Abstract :
In this paper, in order to measure the Young´s modulus of bulk single crystal silicon, a linear microactuator is designed and fabricated. C-V curve is measured and the Young´s modulus is extracted. The result agrees well with the data published.
Keywords :
Young´s modulus; elastic moduli measurement; elemental semiconductors; microactuators; silicon; C-V measurement; Si; Young´s modulus; bulk single crystal silicon; linear microactuator; Actuators; Bandwidth; Capacitance; Capacitance-voltage characteristics; Fingers; Microactuators; Servomechanisms; Silicon; Springs; Stators;
Conference_Titel :
Magnetic Recording Conference, 2002. Digest of the Asia-Pacific
Conference_Location :
Singapore
Print_ISBN :
0-7803-7509-2
DOI :
10.1109/APMRC.2002.1037702
