Title :
Heating by RF sheaths in low pressure discharges
Author_Institution :
University of California
Keywords :
Cathodes; Conductivity; Electrodes; Electrons; Glow discharges; Heating; High intensity discharge lamps; Laboratories; Radio frequency; Voltage;
Conference_Titel :
Plasma Science, 1991. IEEE Conference Record - Abstracts., 1991 IEEE International Conference on
Conference_Location :
Williamsburg, VA, USA
Print_ISBN :
0-7803-0147-1
DOI :
10.1109/PLASMA.1991.695674
