Title :
A millimeter-wave integrated sensor for the dielectric constant characterization of pico-liter volumes of liquids
Author :
Franc, Anne-Laure ; Ferrari, Philippe ; Rehder, Gustavo
Author_Institution :
IMEP-LAHC, Univ. de Grenoble, Grenoble, France
Abstract :
A transmission line-based integrated sensor is investigated for the dielectric constant characterization of liquids using pico-liter volumes. The sensor is manufactured using the back-end-of-line of a CMOS 0.35 μm from AMS. A simple maskless etching post-CMOS process is used to realize a cavity underneath a transmission line to insert the liquid-under-test. Measurements with a vector network analyzer demonstrate a promising method for the characterization of the dielectric constant of liquids up to 40 GHz.
Keywords :
CMOS integrated circuits; liquids; millimetre wave detectors; millimetre wave measurement; network analysers; permittivity measurement; transmission lines; volume measurement; AMS; dielectric constant characterization; liquid-under-test; liquids; millimeter-wave integrated sensor; pico-liter volume; simple maskless etching post-CMOS process; transmission line; transmission line-based integrated sensor; vector network analyzer; Aluminum; Fabrication; Hafnium; Liquids; Silicon; Temperature sensors; Vectors; Dielectric characterization; liquid; millimeter-wave; pico-liter; slow-wave transmission lines;
Conference_Titel :
Semiconductor Conference Dresden-Grenoble (ISCDG), 2012 International
Conference_Location :
Grenoble
Print_ISBN :
978-1-4673-1717-7
DOI :
10.1109/ISCDG.2012.6360034
