DocumentCode
2321792
Title
Gas sensor array based on surface acoustic wave devices for rapid multi-detection
Author
Ming-Chang Chiang ; Hsu-Chao Hao ; Chen-Yun Hsiao ; Szu-Chieh Liu ; Chia-Min Yang ; Kea-Tiong Tang ; Da-Jeng Yao
Author_Institution
Dept. of Power Mech. Eng., NTHU, Hsinchu, Taiwan
fYear
2012
fDate
16-19 Oct. 2012
Firstpage
139
Lastpage
142
Abstract
A surface acoustic wave (SAW) sensor array was developed for sensing amino gas. Poly-N-vinylpyrrolidone (PNVP) composite film as a sensitive interface material was deposited onto a 128° YX-LiNbO3 substrate by the spin coating technique. Moreover, we have developed an improved portable electronic noise based on a 2×2 non-continuously working oscillators equipped with coated SAW sensor array. This gas sensor array system consists of SAW sensors, polymers with different polarity of function groups, signal readout electronics with quick connector, miniature sensing chamber made by acrylic, and aluminum plates. The adsorption of amino gas by the sensitive coating material modulates the phase velocity of the acoustic wave due to the mass loading and acoustoelectric effect. Thus, the targeted amino gas can be evaluated by recording the frequency shift of the SAW device. The fast response time (49 s) and recovery time (64 s), and larger frequency response of 800 Hz were observed from the fabricated SAW sensor under 150 ppm concentration of amino gas. The detection response and large frequency shift have been improved under current generation of SAW sensing array system.
Keywords
acoustic arrays; acoustoelectric devices; adsorption; filled polymers; gas sensors; polymer films; readout electronics; sensor arrays; spin coating; surface acoustic wave sensors; thin film sensors; LiNbO3; PNVP; SAW device; SAW sensing array system; acoustoelectric effect; acrylic plates; adsorption; aluminum plates; amino gas sensor array; coated SAW sensor array; detection response; fast response time; frequency response; frequency shift; mass loading; miniature sensing chamber; noncontinuously working oscillators; phase velocity; poly-N-vinylpyrrolidone composite film; polymers; portable electronic noise; rapid multidetection; recovery time; sensitive coating material; sensitive interface material; signal readout electronics; spin coating technique; surface acoustic wave devices; surface acoustic wave sensor array; Ammonia sensor; Low concentration; Polymer films; Rapid detection; Surface acoustic wave; sensor array;
fLanguage
English
Publisher
ieee
Conference_Titel
Nanotechnology Materials and Devices Conference (NMDC), 2012 IEEE
Conference_Location
Waikiki Beach, HI
Print_ISBN
978-1-4673-2871-5
Type
conf
DOI
10.1109/NMDC.2012.6527578
Filename
6527578
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