• DocumentCode
    2321792
  • Title

    Gas sensor array based on surface acoustic wave devices for rapid multi-detection

  • Author

    Ming-Chang Chiang ; Hsu-Chao Hao ; Chen-Yun Hsiao ; Szu-Chieh Liu ; Chia-Min Yang ; Kea-Tiong Tang ; Da-Jeng Yao

  • Author_Institution
    Dept. of Power Mech. Eng., NTHU, Hsinchu, Taiwan
  • fYear
    2012
  • fDate
    16-19 Oct. 2012
  • Firstpage
    139
  • Lastpage
    142
  • Abstract
    A surface acoustic wave (SAW) sensor array was developed for sensing amino gas. Poly-N-vinylpyrrolidone (PNVP) composite film as a sensitive interface material was deposited onto a 128° YX-LiNbO3 substrate by the spin coating technique. Moreover, we have developed an improved portable electronic noise based on a 2×2 non-continuously working oscillators equipped with coated SAW sensor array. This gas sensor array system consists of SAW sensors, polymers with different polarity of function groups, signal readout electronics with quick connector, miniature sensing chamber made by acrylic, and aluminum plates. The adsorption of amino gas by the sensitive coating material modulates the phase velocity of the acoustic wave due to the mass loading and acoustoelectric effect. Thus, the targeted amino gas can be evaluated by recording the frequency shift of the SAW device. The fast response time (49 s) and recovery time (64 s), and larger frequency response of 800 Hz were observed from the fabricated SAW sensor under 150 ppm concentration of amino gas. The detection response and large frequency shift have been improved under current generation of SAW sensing array system.
  • Keywords
    acoustic arrays; acoustoelectric devices; adsorption; filled polymers; gas sensors; polymer films; readout electronics; sensor arrays; spin coating; surface acoustic wave sensors; thin film sensors; LiNbO3; PNVP; SAW device; SAW sensing array system; acoustoelectric effect; acrylic plates; adsorption; aluminum plates; amino gas sensor array; coated SAW sensor array; detection response; fast response time; frequency response; frequency shift; mass loading; miniature sensing chamber; noncontinuously working oscillators; phase velocity; poly-N-vinylpyrrolidone composite film; polymers; portable electronic noise; rapid multidetection; recovery time; sensitive coating material; sensitive interface material; signal readout electronics; spin coating technique; surface acoustic wave devices; surface acoustic wave sensor array; Ammonia sensor; Low concentration; Polymer films; Rapid detection; Surface acoustic wave; sensor array;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Nanotechnology Materials and Devices Conference (NMDC), 2012 IEEE
  • Conference_Location
    Waikiki Beach, HI
  • Print_ISBN
    978-1-4673-2871-5
  • Type

    conf

  • DOI
    10.1109/NMDC.2012.6527578
  • Filename
    6527578