Title :
Forward and retraced scanning combined imaging method for fast scanning atomic force microscopy
Author :
Ren Xiao ; Fang Yongchun ; Lv Qing ; Wu Yinan
Author_Institution :
Inst. of Robot. & Autom. Inf. Syst., Nankai Univ., Tianjin, China
Abstract :
For nearly all atomic force microscopies (AFMs) utilized now, only the signals in forward scanning process are employed to reconstruct the sample surface topography, while the retraced scanning process is just for adjustment. In this paper, a forward and retraced scanning combined imaging method for AFM is proposed to increase surface reconstruction accuracy. Specifically, two reconstructed topography images are obtained, one is for forward scanning and the other is for retraced scanning; the hysteresis distortion is compensated with a data fusion based post-processing method; then the two images are combined together with confidence levels to reconstruct the final accurate topography image. This novel imaging method is especially valid for fast scanning tasks, when it is hard to accurately reconstruct the sample surface topography with only forward scanning signals. Some simulation and experimental results are included to demonstrate the superior performance of the proposed imaging method.
Keywords :
atomic force microscopy; surface reconstruction; surface topography measurement; AFM; data fusion based post-processing method; fast scanning atomic force microscopy; forward and retraced scanning combined imaging method; hysteresis distortion; reconstructed topography images; surface reconstruction; surface topography; Gratings; Hysteresis; Image reconstruction; Imaging; Mathematical model; Surface topography; Atomic Force Microscopy (AFM); Combined Imaging Method; Fast Scanning; Hysteresis Compensation;
Conference_Titel :
Control Conference (CCC), 2014 33rd Chinese
Conference_Location :
Nanjing
DOI :
10.1109/ChiCC.2014.6895950