Switching strategy design for a 2D torsional MEMS micromirror with sidewall electrodes

In this paper, we study the switching strategy design for the tilt angle of a 2-Degree-of-Freedom (DOF) torsional MEMS micromirror with sidewall electrodes. Under the switched linear system framework, we first reveal that the subsystems of the switched system have different equilibriums. Then we design a periodic and synchronous switching strategy for the system. Thus, for any desired point except the equilibriums, the convergence to a region around the point could be realizable. Furthermore, we design an observer for the system by considering the fact that the angular velocity of micromirror is difficult to available in practice. Such a designed observer can exponentially estimate the angular velocity and have a weak version of the separation property for switching and observer design.