• DocumentCode
    2325599
  • Title

    New all 2-inch manufacturable high performance evanescent coupled waveguide photodiodes with etched mirrors for 40 Gb/s optical receivers

  • Author

    Achouche, M. ; Demiguel, S. ; Derouin, E. ; Carpentier, D. ; Barthe, F. ; Blache, F. ; Magnin, V. ; Harari, J. ; Decoster, D.

  • Author_Institution
    Alcatel R&I, Marcoussis, France
  • fYear
    2003
  • fDate
    23-28 March 2003
  • Firstpage
    341
  • Abstract
    Evanescent PIN photodiodes are fabricated using all 2"-InP processing including on-wafer mirrors and coatings. 0.73 A/W responsivity at 1.55 μm, -1 dB vertical coupling tolerance of 2.2 μm and 47 GHz bandwidth are simultaneously demonstrated.
  • Keywords
    III-V semiconductors; antireflection coatings; etching; indium compounds; mirrors; optical fabrication; optical receivers; optical waveguides; p-i-n photodiodes; wafer bonding; 40 Gbits/s; 47 GHz; InP; InP processing; PIN photodiodes; coatings; etched mirrors; evanescent coupled waveguide photodiodes; fabrication; optical receivers; responsivity; vertical coupling tolerance; wafer mirrors; Etching; Length measurement; Manufacturing; Mirrors; Optical coupling; Optical fiber polarization; Optical receivers; Optical waveguides; Photodiodes; Shape measurement;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Optical Fiber Communications Conference, 2003. OFC 2003
  • Print_ISBN
    1-55752-746-6
  • Type

    conf

  • DOI
    10.1109/OFC.2003.1248117
  • Filename
    1248117
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2325599