DocumentCode
2326715
Title
Novel integrated MEMS horn antenna for terahertz applications
Author
Yuan, Yong ; Liu, Yong ; Lv, Xin
Author_Institution
Dept. of Electron. Eng., Beijing Inst. of Technol., Beijing, China
fYear
2009
fDate
21-25 Sept. 2009
Firstpage
1
Lastpage
2
Abstract
In this paper, a novel integrated horn antenna for terahertz applications is proposed in order to enhance the performance of planar antenna elements. The processing of this type horn antenna combines two different MEMS techniques, DRIE and wet etching. The structure of the horn includes two parts, pyramid horn back cavity and octagonal horn front cavity. There are many tunable parameters of the horn, so high performance terahertz antenna elements can be achieved by synthesizing these parameters.
Keywords
horn antennas; micromechanical devices; planar antennas; terahertz waves; MEMS horn antenna; microelectromechanical system; octagonal horn front cavity; planar antenna element; pyramid horn back cavity; terahertz antenna element; terahertz application; wet etching; Dipole antennas; Horn antennas; Micromechanical devices; Planar arrays; Silicon; Sputtering; Submillimeter wave technology; Substrates; Wafer bonding; Wet etching;
fLanguage
English
Publisher
ieee
Conference_Titel
Infrared, Millimeter, and Terahertz Waves, 2009. IRMMW-THz 2009. 34th International Conference on
Conference_Location
Busan
Print_ISBN
978-1-4244-5416-7
Electronic_ISBN
978-1-4244-5417-4
Type
conf
DOI
10.1109/ICIMW.2009.5325632
Filename
5325632
Link To Document