Title :
Design, fabrication and performance evaluation of a piezoresistive arsenic sensor
Author :
Islam, Md Shofiqul ; Das, Sourav ; Shandhi, Md Mobashir Hasan
Author_Institution :
Dept. of Electr. & Electron. Eng., Bangladesh Univ. of Eng. & Technol., Dhaka, Bangladesh
Abstract :
In this paper the design, analysis and testing of a cantilever based piezoresistive arsenic sensor has been described. The fabrication on a single crystal silicon substrate utilizes the technologies of anisotropic chemical etching. The arsenic sensor, which is of resistive type, changes its resistance when the sensing cantilever adsorbs arsenic on its surface coated with arsenic adsorbent. Using the COMSOL software, a model of the structure was established and the stress distribution of the cantilever was analyzed. The results show that the sensor has a high linearity and high sensitivity of 0.76 mV/ppm at room temperature.
Keywords :
arsenic; cantilevers; chemical sensors; elemental semiconductors; etching; microsensors; piezoresistive devices; silicon; As; COMSOL software; anisotropic chemical etching; cantilever based piezoresistive arsenic sensor testing; microsensor; sensor design; single crystal silicon substrate fabrication; Cantilever; FEM; arsenic sensor; microsensor; piezoresistivity;
Conference_Titel :
Electrical and Computer Engineering (ICECE), 2010 International Conference on
Conference_Location :
Dhaka
Print_ISBN :
978-1-4244-6277-3
DOI :
10.1109/ICELCE.2010.5700672
