Title :
Room temperature Nb5N6 bolometer for THz detection
Author :
Kang, L. ; Lu, X.H. ; Chen, J. ; Jin, B.B. ; Wu, P.H. ; Yao, Q.J. ; Shi, S.C.
Author_Institution :
Dept. of Electron. Sci. & Eng., Nanjing Univ., Nanjing, China
Abstract :
Based on Nb5N6 thin film, whose temperature coefficient of resistance is as high as -0.7% /K at room temperature, bolometer integrated with a planar bow-tie antenna has been designed and fabricated for detecting THz signal without the need to cool the bolometer itself. The best attainable electrical responsivity of the bolometer is about -400 V/W at a current bias of 0.4 mA. The electrical NEP is 6.9times10-11 W/Hz1/2 for a modulation frequency at 300 Hz and 9.8times10-12 W/Hz1/2 for a modulation frequency above 10 kHz.
Keywords :
bolometers; bow-tie antennas; planar antennas; signal detection; superconducting thin films; terahertz wave detectors; thin film devices; Nb5N6; THz signal detection; bolometer; current 0.4 mA; electrical NEP; frequency 300 Hz; modulation frequency; planar bow-tie antenna; room temperature; superconducting thin film; temperature coefficient of resistance; Aluminum; Bolometers; Frequency modulation; Niobium; Semiconductor thin films; Sputtering; Substrates; Temperature sensors; Transistors; Voltage;
Conference_Titel :
Infrared, Millimeter, and Terahertz Waves, 2009. IRMMW-THz 2009. 34th International Conference on
Conference_Location :
Busan
Print_ISBN :
978-1-4244-5416-7
Electronic_ISBN :
978-1-4244-5417-4
DOI :
10.1109/ICIMW.2009.5325668
