Title :
Ultra low loss transmission lines on low resistivity silicon substrate
Author :
Henri, H. ; Gonzague, S. ; Matthieu, V. ; Alain, C. ; Gilles, D.
Author_Institution :
Inst. d´Electron. et de Microelectron. du Nord, Univ. des Sci. et Tech. de Lille Flandres Artois, Villeneuve d´Ascq, France
Abstract :
The properties of transmission lines on low-resistivity silicon substrate (/spl rho/=10 /spl Omega/.cm) are investigated. Coplanar lines on silicon substrate with a 10 /spl mu/m dielectric film show that losses of 0.6 dB/mm can be obtained at 50 GHz. A new embedded ultra-low loss coplanar line is proposed, with a broad interval of characteristic impedance.
Keywords :
Coplanar transmission lines; Dielectric thin films; Elemental semiconductors; Field effect MIMIC; Losses; Silicon; 10 micron; 10 ohmcm; 50 GHz; MMICs; Si; characteristic impedance; coplanar lines; dielectric film; low resistivity substrate; millimetre-wave circuits; ultra low loss transmission lines; Attenuation; Conductivity; Coplanar transmission lines; Dielectric losses; Dielectric substrates; Impedance; Propagation losses; Silicon; Transmission line theory; Transmission lines;
Conference_Titel :
Microwave Symposium Digest. 2000 IEEE MTT-S International
Conference_Location :
Boston, MA, USA
Print_ISBN :
0-7803-5687-X
DOI :
10.1109/MWSYM.2000.862331
