DocumentCode
2327638
Title
Nonlinear servo control of MEMS mirrors and their performance in a large port-count optical switch
Author
Brener, I. ; Chu, P. ; Tsai, M. ; Pu, C. ; Chou, M. ; Dadap, I. ; Lee, D. ; Tang, B. ; Peale, D. ; Bonadeo, N. ; Harel, R. ; Wu, C. ; Johnson, J. ; Park, S. ; Lee, S. ; Tong, D. ; Doran, R. ; Bergman, K. ; Chau, T. ; Goldstein, E. ; Lin, L. ; Walker, J. ;
Author_Institution
Tellium, Oceanport, NJ, USA
fYear
2003
fDate
23-28 March 2003
Firstpage
385
Abstract
We demonstrate full closed-loop control of electrostatically actuated double-gimbaled MEMS mirrors and use them in a free space optical cross-connect with switching times of less than 10 ms, and optical power stability of better than 0.2 dB.
Keywords
closed loop systems; electrostatic actuators; micromechanical devices; micromirrors; nonlinear control systems; optical switches; servomechanisms; 10 ms; MEMS mirrors; closed-loop control; electrostatically actuated double-gimbaled MEMS mirrors; free space optical cross-connect; nonlinear servo control; optical power stability; port-count optical switch; Electrodes; Micromechanical devices; Mirrors; Nonlinear optics; Optical control; Optical sensors; Optical switches; Servomechanisms; Servosystems; Voltage;
fLanguage
English
Publisher
ieee
Conference_Titel
Optical Fiber Communications Conference, 2003. OFC 2003
Print_ISBN
1-55752-746-6
Type
conf
DOI
10.1109/OFC.2003.1248284
Filename
1248284
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