• DocumentCode
    2327666
  • Title

    Evaluation of the catalytic metal for the hydrogen sensor using terahertz chemical microscope

  • Author

    Sugimoto, Takeshi ; Kondo, Yosuke ; Kiwa, Toshihiko ; Kawayama, Iwao ; Tonouchi, Masayoshi ; Tsukada, Keiji

  • Author_Institution
    Grad. Sch., Natural Sci. & Technol., Okayama Univ., Okayama, Japan
  • fYear
    2009
  • fDate
    21-25 Sept. 2009
  • Firstpage
    1
  • Lastpage
    2
  • Abstract
    To develop the hydrogen sensor, the chemical potential due to the catalytic reaction of the metals are required to evaluate. The platinum and titanium layered electrode on the insulator/semiconductor layered device are fabricated as the test chip. The catalytic reaction of platinum and hydrogen gas were successfully visualized.
  • Keywords
    catalysis; chemical potential; gas sensors; hydrogen; submillimetre wave devices; catalytic metal reaction; chemical potential; hydrogen gas; hydrogen sensor; insulator-semiconductor layered device; platinum layered electrode; terahertz chemical microscope; titanium layered electrode; Chemical sensors; Electrodes; Hydrogen; Insulation; Insulator testing; Microscopy; Platinum; Semiconductor device testing; Titanium; Visualization;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Infrared, Millimeter, and Terahertz Waves, 2009. IRMMW-THz 2009. 34th International Conference on
  • Conference_Location
    Busan
  • Print_ISBN
    978-1-4244-5416-7
  • Electronic_ISBN
    978-1-4244-5417-4
  • Type

    conf

  • DOI
    10.1109/ICIMW.2009.5325729
  • Filename
    5325729
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2327666