Title :
Development of microwave/millimeter wave integral passives for multi-layer organic MCMs
Author :
Manohar, S. ; Jin, Z. ; Pham, A. ; Krishnamurthy, V. ; Bates, D. ; Marcinkewicz, W. ; Schmanski, B. ; Saia, R. ; Sprinceanu, L.
Author_Institution :
Dept. of Electr. & Comput. Eng., Clemson Univ., SC, USA
Abstract :
We present the design and development of the high-density multi-layer organic based MCMs at microwave/millimeter wave frequencies. Ta/sub 2/N thin-film resistors have been developed and directly integrated onto Kapton and benzocyclobutene (BCB) flex that increases the packaging density and improves manufacturability. The experimental results demonstrate that the integral 50-/spl Omega/ termination on multi-layer Kapton/BCB flex achieves a return loss of less than 20-dB up to 50 GHz.
Keywords :
Equivalent circuits; Microwave integrated circuits; Millimetre wave integrated circuits; Multichip modules; Thin film resistors; 0 to 50 GHz; 50 ohm; Kapton; Ta/sub 2/N; benzocyclobutene; high-density multi-layer organic based MCMs; manufacturability; microwave/millimeter wave integral passives; packaging density; return loss; thin-film resistors; Circuit simulation; Equivalent circuits; Frequency; Integrated circuit interconnections; Millimeter wave technology; Packaging; Resistors; Sputtering; Thin film circuits; Wideband;
Conference_Titel :
Microwave Symposium Digest. 2000 IEEE MTT-S International
Conference_Location :
Boston, MA, USA
Print_ISBN :
0-7803-5687-X
DOI :
10.1109/MWSYM.2000.862348
